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Electron microscopy study of reactively sputter-deposited Ti/N films on silicon

Paper Details
Authors:
V. Kannan
Akhilesh Kumar Singh
R. B. Irwin
S. Chittipeddi
F. Nkansah
W.T. Cochran
Publication Date: 1992-08-01
Metal and Thin Film MechanicsEngineeringMechanics of MaterialsPhysical Sciences
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Electron microscopy study of reactively sputter-deposited Ti/N films on silicon - KNUST Research Atlas