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High performance 0.25 μm SRAM technology with tungsten interpoly plug

Paper Details
Authors:
T. McNelly
J.D. Hayden
A.H. Perera
J.R. Pfiester
C.K. Subramanian
M. Blackwell
B.M. James
Sergio A. Ajuria
W. Fell
Y.-C. Ku
T. Lii
J.-H. Lin
F. Nkansah
Cece Philbin
Chao Sun
Matthew A. Thompson
M. Woo
Publication Date: 2002-11-19
Advancements in Semiconductor Devices and Circuit DesignEngineeringElectrical and Electronic EngineeringPhysical Sciences
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