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Comparison of Al electromigration in conventional Al alloy and W-plug contacts to silicon

Paper Details
Authors:
A. S. Oates
Elodie Martin
D. Alugbin
F. Nkansah
Publication Date: 1993-06-21
Copper Interconnects and ReliabilityMaterials ScienceElectronic, Optical and Magnetic MaterialsPhysical Sciences
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